Atomic Control for Epitaxy kSA ACE Metrology Tool Now Available
We are proud to introduce our newest thin-film metrology product, the kSA ACE (Atomic Control for Epitaxy).
k-Space engineers designed this tool with input from scientists in the research and production communities to provide an accurate and high-resolution in situ instrument that monitors flux and growth rate of atomic species, using the principle of atomic absorption spectroscopy. The kSA ACE uses conventional hollow cathode lamps (HCLs) to generate the atomic emission for the elements of interest. The instrument utilizes two high-sensitivity, UV-optimized solid-state spectrometers — one to monitor the absorption and the other to monitor signal drift from the HCLs.
The kSA ACE can measure up to three elements simultaneously and with high accuracy, providing precise control over material-specific flux in multi-source processes. This tool is ideal for applications in the fabrication of III-V and II-V compounds, semiconductor devices, thin film sensors, solar cells, optical coatings, x-ray optics, flat panel displays, and more.
Darryl Barlett, CEO of k-Space Associates, Inc., stated, “When we learned that there was a demand for a highly sensitive flux monitoring tool with long term repeatability under continuous operation, we collaborated with the scientific community to develop the kSA ACE to provide them with the stability and resolution that they need. It’s been a challenging product to develop, but we’re very happy with the end result and are looking forward to seeing it in operation on deposition tools across the globe.”
To learn more about the kSA ACE, visit https://k-space.com/product/ksa-ace/.
New MOCVD Wafer Carrier Defect Analysis Feature Added to the kSA Emissometer
We have added an exciting new feature to the kSA Emissometer that will make it an even more effective tool for detecting defects in MOCVD wafer carriers.
The kSA Emissometer is a state-of-the-art metrology tool designed to easily generate high-resolution diffuse and specular reflectance and total emissivity maps of MOCVD carriers. Variation in carrier emissivity correlates to temperature non-uniformity, which can lead to reduced device yield and growth run issues. This new feature makes the kSA Emissometer even more essential for fabs to help with early defect detection, and for carrier manufacturers to detect quality issues before they ship the carrier to their end user.
At the end of a carrier scan, this new feature displays the number of defects detected and summarizes the number of pocket defects, web defects, and halo-region defects. The software outlines the defect regions in the carrier image to easily identify their positions. The user can save the image files to examine or analyze later. This allows fabs to pull the defective wafer carriers before they cause an issue, and they can perform in-depth analysis later. To discover more about these capabilities, visit the kSA Emissometer webpage.
k-Space Receives a Large Solar Panel Edge Profile Metrology Order
We are excited to announce that we recently received a large order for solar panel edge profile metrology systems.
The non-contact, inline glass metrology tool measures the edge profile of the solar panels using proven optical triangulation technology and 405nm laser technology. The system measures glass thickness, edge radius and glass sheet offset, and it detects edge defects (chips, cracks), all in real-time and with extremely high spatial resolution. Full panel dimensions, including length, width, and squareness, are also measured with the tool.
This tool helps manufacturers to improve their yield through process control and by detecting issues, such as the need to change or adjust grinder wheels. The data archiving and analysis provided in the software allows for in-process panel validation and upstream quality control. Also, early identification of edge defects reduces the chance of glass breakage and the potential yield losses further down the line.
Darryl Barlett, CEO of k-Space Associates, Inc., stated, “We are excited to offer tools that combine advanced sensor technology with our engineering expertise into a total package that includes hardware, software, and database capabilities and integrates into the customer’s existing system. These tools will ultimately save them money and allow them to produce a more consistent product.” For more information on the kSA Panel Edge Profile metrology system for glass, solar, or other panels, please visit the solar or glass metrology section of our website.
k-Space will be closed for the winter holidays starting at the end of business on December 22, 2021 and reopening January 3, 2022. Happy New Year!