Monitor film thickness directly on coater tools. Proprietary k-Space spectral fringe analysis determines semi-transparent thin-film thickness in real-time.
Description
The In Situ Film Thickness metrology tool is a non-contact, non-destructive, real-time thin film characterization sensor that utilizes the detailed spectral analysis of specularly reflected light from the solar panel. This system is designed to monitor film thickness directly on coater tools.
Details
- Proprietary k-Space spectral fringe analysis determines semi-transparent thin-film thickness in real-time.
- k-Space software analyzes the below-gap spectral interference fringes to determine the total film thickness.
- The system acquires spectra data and determines thickness in real-time, all without interfering with the production line.
- Typical systems include 2 probes per tool (left channel and right channel).
- A sapphire reference normalizes the light source output.
- The tool detects panels through a threshold signal level (peak intensity of raw spectrometer signal).
