Application Notes : kSA BandiT – Interface with Veeco & Riber Software
kSA BandiT Interfaces with Veeco and Riber Software
k-Space has expanded its communications capabilities with both Riber’s Crystal XE and Veeco’s Molly control software. Using a predefined kSA BandiT equipment profile, customers can view kSA BandiT data in Crystal XE or Molly in real-time, and can also record this data along with their other important growth data. This integration allows for quick access to the various wafer temperature measurement parameters provided by kSA BandiT.
kSA BandiT now offers:
- Band Edge: Band Edge Temperature, Band Edge Fit Confidence, and Band Edge Wavelength
- Blackbody: Blackbody Temperature and Goodness of Fit
- Broadband Pyrometry: Pyrometer Temperature
- Multi Wafer: For customers utilizing the kSA multi-wafer platform, the above data are available from multiple marker/wafer positions.
This kSA BandiT screenshot shows the real-time temperatures for the four selected markers, the band edge temperatures of the markers over a full rotation, and the band edge temperatures over time. It overlays Crystal XE’s System View, which displays the kSA BandiT data in real-time. It can be customized to display other real-time data as well. The start, stop, pause, and resume buttons allow for easy control of kSA BandiT data acquisition from Crystal XE.
This Molly screenshot illustrates the integration of kSA BandiT. It shows band edge temperature, band edge fit confidence, pyrometer temperature, blackbody temperature, and blackbody goodness of fit for three selected markers. It can support up to 20 markers. The start and stop buttons allow for easy control of kSA BandiT data acquisition from Molly.