k-Space is a leading manufacturer of in situ, in-line, and ex situ thin film metrology tools designed to improve processes and increase profitability. Our thin film metrology tools are used to monitor nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation, as well as production. Our products utilize optical imaging technology for non-contact, non-invasive measurement of a plethora of important parameters such as wafer and film temperature, thin-film stress and strain, wafer curvature, bow, and tilt, surface roughness and quality, film thickness and deposition rate, optical band gap, atomic spacing, and other custom non-contact measurements.

Thin Film and Industrial Metrology Systems

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