The kSA SpectraTemp is an easy to use, non-contact, optically-based temperature measurement and calibration tool that measures absolute temperature.
kSA SpectraTemp is an easy to use, non-contact, optically-based temperature measurement and calibration tool that measures absolute temperature. Using patented analysis of the spectral radiation profile, kSA SpectraTemp can determine absolute temperature without any prior temperature calibration or knowledge of the material emissivity.
Achieve high accuracy and repeatability in your temperature measurements.
It’s an easy solution for pyrometer calibration, blackbody sources, and kSA ECP module calibration at the beginning of each growth with no system downtime. Within seconds the absolute blackbody temperature is available.
Use it to measure absolute temperature of the MOCVD wafer carrier without any prior calibration, allowing you to calibrate pyrometers between reactors.
kSA SpectraTemp can be used to measure the absolute temperature of semiconductor wafers, metals, ceramics, and much more. Because it utilizes a solid-state spectrometer, data acquisition is fast and real-time temperature measurement is obtained. The kSA SpectraTemp can also be used to calibrate other temperature measurement devices, including standard infrared pyrometers.
- Semiconductor Wafers
The kSA SpectraTemp is a good solution for absolute temperature measurement and calibration of pyrometers and other blackbody like sources.
- MOCVD Carrier Temperature
- Infrared Pyrometer Calibration
- Semiconductor Wafer Temperature