Product Specifications : kSA SpectraTemp
- kSA SpectraTemp
- System Overview
- Functional Specifications
- Spectrometer Specifications
- Computer Specifications
- Chamber Requirements
- Example Screen
kSA SpectraTemp is an easy to use, non-contact, optically-based temperature measurement and calibration tool that measures absolute temperature. Using patented analysis of the spectral radiation profile, kSA SpectraTemp can determine absolute temperature without any prior temperature calibration or knowledge of the emissivity of the radiating material.
kSA SpectraTemp can be used to measure the temperature of semiconductor wafers, metals, ceramics, and much more. The kSA SpectraTemp can also be used to calibrate other temperature measurement devices, including standard infrared pyrometers. As part of this patented technology, SpectraTemp has the ability to determine whether the measured temperature is valid, so you can have utmost confidence in your measurement!
|MOCVD carrier temperature
|Infrared pyrometer calibration|
|Semiconductor wafer temperature
|Miscellaneous source temperature|
|Semiconductor materials (bandgap < 1.4 eV)
The standard kSA SpectraTemp system comes with a spectrometer, optics head, fiber, USB cable, and control software. There are two options for the spectrometer used in the system: the standard NIR spectrometer (SPECTRA) , and the cooled NIR spectrometer for expanded temperature range measurement (SPECTRA-C). In addition to this hardware and software, a computer with a USB connection is required for tool operation.
|Spectrometer unit||SPECTRA - Extended range NIR 870-1670nm spectrometer|
|SPECTRA-C - Extended range NIR 870-1670nm cooled
spectrometer for enhanced low temperature measurement
|Data Acquisition and Analysis Software||Standard|
|Optics Head||Standard for a 1.33”, 2.75”, or 4.5” o.d. viewport. To be specified at time of order. Custom optical heads quoted separately.|
Add on for kSA ICE
|Spectrometer calibration unit for use with kSA ICE-ECPR module.||ICE-SPECT|
|Substrate Material Capabilities||All semi-absorbing semiconductor materials with a bandgap smaller than 1.4 eV, metals, ceramics, and more|
|Temperature Range||> 350⁰C (SPECTRA)
> 180⁰C (SPECTRA-C)
|Spot Size Diameter||3-5mm|
|Temperature Repeatability||± 0.5⁰C|
|Temperature Resolution||0.2⁰C > 400⁰C (uniform material sample)|
|Temperature Accuracy*||± 3⁰C, 350-500⁰C (SPECTRA)
± 3⁰C, 180-500⁰C (SPECTRA-C)
± 2⁰C, > 500⁰C (both SPECTRA and SPECTRA-C)
|Data Acquisition||1µs - 3s (Rate depends on sample temperature and the intensity of the signal collected; software has the option to automatically adjust acquisition rate based on the real-time signal intensities.)|
|I/O Interface||USB 2.0|
|Module Size||10.03” x 7.25”x 4.225” (allow 3” for cables at front and back of 7.25” measurement direction). Please note that with the cooled spectrometer (SPECTRA-C) the unit will be larger.
*Accuracy is guaranteed when the goodness of fit measurement of the tool is ≤ 0.1: for goodness of fit measurement > 0.1 then the radiation detected is not in true blackbody form, and the temperature accuracy is lost.
|Extended Range NIR|
|Extended Range Cooled NIR
|Temperature Range||> 350⁰C (Standard spectrometer)||> 180⁰C (Cooled spectrometer)|
|Application||All semi-absorbing semiconductor materials with a bandgap smaller than 1.4eV, metals, ceramics, and more||All semi-absorbing semiconductor materials with a bandgap smaller than 1.4eV, metals, ceramics, and more|
|Sensor Type||128 element temperature stabilized InGaAs Array||Peltier cooled 256 element InGaAs Array|
|Rotation Speed Range||0-1500rpm||0-1500rpm|
|Triggering||TTL trigger input, 5V max||TTL trigger input, 5V max|
|Power||120/240 VAC||120/240 VAC|
A computer is required to run SpectraTemp. k-Space recommends purchasing a laptop (kNB-LLT) from k-Space for your convenience. All software is loaded and tested prior to shipping. If another computer is used it must meet the following minimum specifications:
- Processor: Dual Core or higher, minimum I3
- Speed: Minimum 2GHz
- Memory: Minimum 4GB
- Video: 1024 x 768, 16-bit depth
- Hard Disk: Minimum 500MB
- OS: Windows™ 10
- Interface: Single USB 2.0 port
- Optical viewport at a non-glancing angle
- Minimum aperture size of ~2mm. Anything less than 5mm will potentially require an xy stage and custom mounting, quoted separately.
Above: Sample data collection screen showing temperature display as well as temperature vs. time. Configure the screen for the view you want. Other options include goodness of fit and real time blackbody spectra. All acquired data can be stored to a file or output to an analog output channel or via TCP/IP interface.
Left: Simply press the start button to acquire absolute temperature.
k-Space has an expansive network of distributors to best serve our worldwide customer base.