From triggering to RHEED accessories, there are options to make your metrology system work better for you. Explore the benefits of triggering options based on rotation position, rotation stage or pulse as well as RHEED screens, beam alignment substrates, and more.
From triggering to RHEED accessories, there are options to make your system work better for you. Explore the benefits of triggering options based on rotation position, rotation stage or pulse as well as RHEED screens and beam alignment substrates.
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Rotation Monitoring and Triggering (RMAT)
The Rotation Monitoring and Triggering (RMAT) system has been developed by k-Space to provide an accurate, programmable triggering solution for synchronizing metrology equipment to sample rotation during thin-film deposition. The package seamlessly integrates a 12-bit absolute encoder and programmable logic controller (PLC) with user-friendly Windows-based software to provide four programmable trigger outputs that can be used to initiate measurements at specific rotation positions.
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Laser Trigger Module (LTM)
The LTM (Laser Trigger Module) product was developed by k-Space to meet the needs of scientists and engineers who desire an accurate trigger source coupled to a rotation stage during thin-film deposition. With the Laser Trigger Module, the user can program a single, precise trigger position during sample rotation to initiate external events such as acquiring images or making measurements at a specific rotation angle. By using a simple laser and high speed photo detector assembly mounted near the sample rotation shaft, rotation speeds up to 1500 rpm can be properly tracked and utilized within any kSA product to define a specific measurement position. Custom mounting brackets are typically required for individual needs and can be manufactured at additional cost.
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kSA Pulse Control
kSA Pulse Control utilizes easy-to-use Windows software to allow the user to generate square waves of any frequency in the range of 0.00077 Hz to 500.00 kHz. Pulse trains of a user-specified number of pulses may also be generated, real-time counted and displayed. Pulse trains can also be paused and resumed at the user’s discretion. The pulses are TTL-level and are true square wave. The kSA Pulse Control software is easy to use, with a single dialog box for entering all the parameters needed for pulse generation. Includes a Counter/Timer board and a 20′ pulse output cable with a 37-pin connector on one end and a BNC connector on the other.
The kSA Pulse Control kit is a pulse generator and pulse counter system. The kit is designed as a simple, inexpensive, programmable pulsed waveform source for triggering events and instrumentation. A common use of the Pulse Control kit is in Pulsed Laser Deposition (PLD), whereby the laser pulse rate and number of pulses is controlled through the Pulse Control kit. Any application that needs a triggered or timed input can make use of kSA Pulse Control.
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RHEED Screens
k-Space offers the highest quality RHEED screens available. We supply P43, P31, or P48 (fast) phosphor screens, full or partial coat for standard and o.d. viewports. We can also re-coat existing screens. All screens are X-ray attenuating glass, and have a thin aluminum layer for grounding and stray light reflection. Optional stainless steel screen holders that mount inside standard zero profile viewports are also available.
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Beam-Alignment Substrates
For determining RHEED beam placement on the substrate, k-Space also provides 1″, 2″ and 3″ diameter Si substrates coated with P43 phosphor and silicate treated for smear resistance. UHV compatible.
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Gain insight into what is happening during your growth when you view your wafers and platen in real-time through k-Space software with kSA Insight Plus. The imaging system utilizes a high-resolution camera along with an LED light ring to illuminate the chamber and is plug and play compatible with all k-Space thin-film metrology software.
With kSA Insight Plus you have a real-time view into your deposition process. All that is required is a viewport that points towards your substrate stage or platen. The live video can be zoomed in or out, and full resolution images can be snapped and stored at any time from within the kSA software.
kSA Insight Plus is available as an add-on to new or existing k-Space in situ metrology tools. kSA Insight Plus fits on multiple size viewports, including 2.75”, 4.5”, 6”, and 8” diameters. Choose between either a monochrome or color, high spatial resolution camera. And the included zoom lens allows for focus over a large range of working distances.
For more information see the kSA Insight Plus Product Specification Sheet →
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k-Space thin-film metrology tools are enhanced with kSA software, data communications protocols, and IO options, plus full support. Contact our technical sales team to find out more. Easily connect with your existing set-up.
Communication protocols include:
- TCP/IP Comms for digital IO
- Analog Input/Output Boards for analog IO
- Info on live exporting to text file, SQL
- Info on the LabVIEW interface
- Chamber Integration with Veeco and Riber
Access the kSA Communications interface. Access the kSA AppCmd Client.
Customers also receive full access to the k-Space Knowledge Base. This includes FAQs, customer best practices, troubleshooting guides, video aids, and more.
Hg-Ar Calibration Lamps
We make our own Hg-Ar lamps plus other electronics to provide a single source of supply for you to focus on research.
Our Hg-Ar ‘tube’ lamps are insensitive to temperature.
In addition, we also have a 3D print lab to craft custom metrology parts and accessories. k-Space is able to design and prototype the exact metrology tool each customer needs.
