Product Specifications: kSA Insight Plus

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Product Specifications : kSA Insight Plus

Version: 1.0

kSA Insight Plus
Distributors

Gain insight into your deposition!

View your wafers and platen directly from your computer screen.

kSA Insight Plus is a camera and viewport light ring that illuminates your chamber from the viewport and displays it live. This tool allows researchers and operators to view their illuminated wafers and platen in real-time from within the k-Space software for a better indication of process parameters and performance. The kSA Insight Plus imaging system utilizes an LED ring light and high-resolution camera. The system is plug-and play compatible with all k-Space thin-film metrology software.

The included zoom lens allows for focus over a large range of working distances. The live video can be zoomed in or out, and full resolution images can be snapped and stored at any time from within the k-Space software. This tool seamlessly integrates with existing k-Space software including kSA 400, kSA BandiT, kSA MOS, and kSA ICE.

The kSA Insight consists of a 1292 x 964 camera, flange mount (2.75”, 4.5”, 6”, and 8” flange mounts available), PCle GigE communication card with PoE, and ethernet cable. Live image is viewable from existing kSA software (not included). Available with either a color or monochromatic camera.

Gain insight into your deposition today!

Distributors

Worldwide distributors for k-Space associates thin film metrology k-Space has an expansive network of distributors to best serve our worldwide customer base.