In Situ Wafer Temperature and Film Temperature Measurement
Precise wafer temperature measurement and control during film growth is critical to achieving high device yield and performance. Achieving this control necessitates accurate real-time measurement. k-Space offers five in situ thin-film metrology tools that measure wafer temperature and/or film temperature with various methods. kSA BandiT incorporates band edge, blackbody, and pyrometry temperature measurements. kSA BandiT PV and kSA ICE both incorporate the kSA BandiT technology. kSA ICE is a modular design that allows for measurement of more than just wafer temperature. kSA SpectraTemp measures absolute temperature and can be used to calibrate pyrometers. kSA Scanning Pyro is a scanning pyrometer designed for MOCVD systems. See each product below to determine which is best for your wafer and film temperature measurements.