Products
k-Space is a leading manufacturer of in situ, in-line, and ex situ thin film metrology tools designed to improve processes and increase profitability. Our thin film metrology tools are used to monitor nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation, as well as production. Our products utilize optical imaging technology for non-contact, non-invasive measurement of a plethora of important parameters such as wafer and film temperature, thin-film stress and strain, wafer curvature, bow, and tilt, surface roughness and quality, film thickness and deposition rate, optical band gap, atomic spacing, and other custom non-contact measurements.
kSA 400
The kSA 400 analytical Reflection High-Energy Electron Diffraction (RHEED) system...
kSA BandiT
Real-time absolute temperature measurement of standard semiconductor substrates like GaAs,...
kSA BandiT PV
Harness the power of this patented technology to improve your...
kSA MOS
Measure and provide feedback for curvature, stress, reflectivity and growth...
kSA MOS UltraScan/ ThermalScan
The kSA MOS UltraScan and kSA MOS ThermalScan systems are...
kSA ICE
The k-Space Integrated Control for Epitaxy system (ICE) is a...
kSA ACE
kSA ACE provides atomic flux control with accurate and high-resolution...
kSA SpectR
The kSA SpectR is an optically-based real-time wafer and film...
kSA RateRat Pro
kSA RateRat Pro is a compact, convenient and easy-to-use optical...
kSA ScanningPyro
For use on Veeco K465i and EPIK700 MOCVD reactors, the...
kSA SpectraTemp
The kSA SpectraTemp is an easy to use, non-contact, optically-based...
kSA Emissometer
Open the door to a quantitative approach to wafer carrier characterization...
kSA Accessories
From triggering to RHEED accessories, there are options to make...
Applications
kSA thin-film metrology instruments are used in a wide range of deposition processes. kSA products measure and provide thin-film process control for important parameters such as temperature, deposition rate, film thickness, stress, curvature, bow, reflectivity, surface roughness, and many other material properties. These are measured in real-time by utilizing probes such as lasers, white light, UV light sources, and electron beams to investigate at an atomic level.
Our thin-film analysis tools are used to extract real-time information from today’s most advanced deposition and processing applications within compound semiconductor, silicon semiconductor and photovoltaic advanced thin film production and R&D.
Sophisticated software analysis and reporting capabilities provide information to better understand the end product or to provide online control during mass production to enhance yield. Tailored optics and fully integrated solutions have been designed for simple mounting and non-invasive monitoring of many applications such as:
Molecular Beam Epitaxy (MBE)
Obtain unmatched process efficiency and quality with powerful tools for...
Metalorganic Chemical Vapor Deposition (MOCVD)
Increase performance and quality with compact in situ tools for...
Sputtering
Monitor and control your sputtering deposition process with in situ...
Thermal and E‑beam Evaporation
Advanced optical device fabrication calls for advanced technologies like in...
Physical Vapor Deposition (PVD)
Increase quality with controlled deposition, stress monitoring and RHEED analysis...
Pulsed Laser Deposition (PLD)
Analyze and control your Pulsed Laser Deposition (PLD) while deposition...
Measurement Methods
When it comes to thin-film growth, having the right thin-film metrology measurement technique with the accuracy you need is critical. We have been developing and perfecting our thin-film metrology since 1992. What do you want to measure?
Rheed Analysis
The kSA 400 is an analytical Reflection High-Energy Electron Diffraction...
Wafer and Film Temperature
In situ measurement via Band Edge, Blackbody, and Pyrometry, typically used...
Thin-film Stress and Strain
The thin-film stress and strain that occur in real-time during...
Wafer Curvature, Bow, and Tilt
In situ tool for measuring real-time film stress, film strain, and...
Surface Roughness and Quality
In Situ tool for measurement via real-time analysis of RHEED...
Film Thickness and Deposition Rate
Knowing thin-film thickness and deposition rate is critical for both...
Photovoltaics
Harness the power of this patented technology to improve your...