k-Space and its staff hold multiple patents related to thin-film metrology. We are the leading manufacturer of in-line, in situ, and ex situ metrology tools for the semiconductor and thin-film industries.
Thin Film Metrology Patents
|Patent||Products Covered by Patent||Patent Issue Date|
|Non-Contact, Optical Sensor for Synchronizing to Free Rotating Sample Platens with Asymmetry||kSA BandiT|
|US 13/691,829 · Filed Dec 2, 2012|
|Blackbody Fitting for Temperature Determination||kSA BandiT|
kSA BandiT - Blackbody Temperature Measurement
kSA BandiT - Blackbody Fitting for Temperature Determination
|US 8,282,273 B2 · Issued Oct 9, 2012|
|Real-Time Temperature, Optical Band Gap, Film Thickness, and Surface Roughness Measurement for Thin Films Applied to Transparent Substrates||kSA BandiT|
|US 61/362,938 · Filed Jul 9, 2011|
|Apparatus and Method for Real-Time Measurement of Substrate Temperatures for Use in Semiconductor Growth and Wafer Processing||kSA ICE |
|US 7,837,383 B2 · Issued Nov 23, 2010|
|Thin-Film Temperature Measurement via Band Edge Thermometry with Thickness Correction||kSA BandiT|
|US 61/218,523 · Filed Jul 9, 2010|
|Curvature/Tilt Metrology Tool with Closed Loop Feedback Control||kSA MOS |
kSA MOS UltraScan
kSA MOS ThermalScan
|US 7,391,523 B1 · Issued Jun 24, 2008|
k-Space metrology products are installed in over 1,000 universities, research labs, and production facilities around the world. Including at leading semiconductor chip makers, solar panel manufacturers, and glass manufacturing companies. You will also find k-Space thin-film metrology tools referenced in hundreds of scholarly and industry research articles.
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This page is intended to serve notice under 35 USC §287(a) that the listed patents and/or applications for patent apply to the identified products as shown.