k-Space and its staff hold multiple patents related to thin-film metrology. We are the leading manufacturer of in-line, in situ, and ex situ metrology tools for the semiconductor and thin-film industries.
Thin Film Metrology Patents
| Patent | Products Covered by Patent | Patent Issue Date |
|---|---|---|
| Non-Contact, Optical Sensor for Synchronizing to Free Rotating Sample Platens with Asymmetry | kSA BandiT kSA MOS kSA ICE | US 9,030,652 B2 - Issued May 12, 2015 |
| Blackbody Fitting for Temperature Determination | kSA BandiT kSA BandiT - Blackbody Temperature Measurement kSA BandiT - Blackbody Fitting for Temperature Determination | US 8,282,273 B2 · Issued Oct 9, 2012 |
| Real-Time Temperature, Optical Band Gap, Film Thickness, and Surface Roughness Measurement for Thin Films Applied to Transparent Substrates | kSA BandiT kSA ICE | US 2013/0321805 A1 - Issued Dec. 5, 2013 International patent: ZL 201180034055.9 - Issued July 11, 2011 |
| Apparatus and Method for Real-Time Measurement of Substrate Temperatures for Use in Semiconductor Growth and Wafer Processing | kSA ICE kSA BandiT | US 7,837,383 B2 · Issued Nov 23, 2010 |
| Thin film temperature measurement using optical absorption edge wavelength | kSA BandiT kSA ICE | US8786841B2 - Issued July, 22 2014 |
| Curvature/Tilt Metrology Tool with Closed Loop Feedback Control | kSA MOS kSA MOS UltraScan kSA MOS ThermalScan kSA ICE | US 7,391,523 B1 · Issued Jun 24, 2008 |
| Calculating Film Thickness from Spectral Reflectivity Data | kSA BandiT kSA ICE | Patent pending |
| Improvements to Fourier Notch Filter Method and System | kSA BandiT | Patent pending |
k-Space metrology products are installed in over 1,000 universities, research labs, and production facilities around the world. Including at leading semiconductor chip makers, solar panel manufacturers, and glass manufacturing companies. You will also find k-Space thin-film metrology tools referenced in hundreds of scholarly and industry research articles.
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This page is intended to serve notice under 35 USC §287(a) that the listed patents and/or applications for patent apply to the identified products as shown.
