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- Home
- Thin Film Metrology
- Products
- kSA 400Industry’s leading Reflection High-Energy Electron Diffraction (RHEED) system
- kSA ACEAtomic flux control for thin-film deposition
- kSA BandiTReal-time absolute temperature measurement of semiconductor substrates
- kSA BandiT PVMeasure and control band gap, thickness, temperature, and surface roughness
- kSA MOSReal-time monitoring for curvature, stress, reflectivity, and growth rate
- kSA MOS UltraScan/ ThermalScanHigh-resolution wafer curvature, bow, and tilt-measurement systems
- kSA ICEIn situ metrology tool designed for today’s MOCVD and MBE reactors
- kSA SpectRReal-time wafer and film spectral reflectance monitor
- kSA RateRat ProCompact optical metrology tool for thin-film characterization
- kSA SpectraTempOptically-based absolute temperature measurement and calibration tool
- kSA ScanningPyroAutomated temperature mapping for MOCVD reactors
- kSA EmissometerDetermine carrier end-of life without wasting growth runs
- kSA AccessoriesRHEED screens, beam alignment substrates, and more
- Applications
- Molecular Beam Epitaxy (MBE)Ultra-High Vacuum, Ultra-Performance Measurement Tools
- Metalorganic Chemical Vapor Deposition (MOCVD)Compact in situ tools for MOCVD
- SputteringMonitor and control your sputtering deposition process
- Thermal and E‑beam EvaporationIn situ tools for feedback of key evaporation parameters
- Physical Vapor Deposition (PVD)Controlled deposition, stress monitoring, and RHEED analysis
- Pulsed Laser Deposition (PLD)Analyze and control your Pulsed Labor Deposition (PLD)
- Measurement Methods
- RHEED AnalysisGain insight into your thin film growth with RHEED analysis
- Wafer and Film TemperaturePrecise wafer temperature measurement and control
- Thin-film Stress and StrainRange of tools to measure thin-film stress and strain
- Wafer Curvature, Bow, and TiltIn situ thin-film stress, strain, and wafer curvature
- Surface Roughness and QualityMeasure surface quality through real-time analysis of RHEED
- Thin-Film Thickness and Deposition RateKnowing thin-film thickness and deposition rate is critical
- PhotovoltaicsIn situ, real-time thin-film deposition monitoring tools
- Characterization Services
- Products
- Industrial Metrology
- Applications
- Glass InspectionCustom glass inspection and glass defect detection tools
- Solar Panel InspectionCustom solar panel metrology tools to improve products and processes
- Automotive InspectionAutomotive metrology tools keep costs low and quality high
- Defect InspectionImplement metrology tools to improve yield
- Industrial InspectionAdvanced metrology tools that integrate with your existing infrastructure
- Factory Integration
- Custom Solutions
- Inline Metrology
- Applications
- Resources
- k-Space Knowledge BaseProduct manuals and helpful tips for customers
- Technical VideosMetrology tools in action
- Material PropertiesMaterial properties and measurements for thin-film applications
- Article ReferencesPeer-reviewed thin-film research papers
- Research Facilities
- About Us
- Why k-SpaceChosen by over 1,000 companies, universities, research labs, and government agencies
- k-Space Representatives and DistributorsGlobal distributors and OEM partners
- Company VideosSee how we put light to work
- CareersJoin our team
- ProductionEach metrology tool is built to your specifications
- Metrology PatentsOur thin-film metrology patents
- Events
- Support
- Contact
Technical Support
k-Space engineers are available to assist you during normal business hours: 8:30am – 5:00pm EST, Monday through Friday.
