kSA ICE

Please note that most specifications are materials and reactor-dependent.
¹ Film thickness and growth rate accuracy is film thickness dependent. Generally, this accuracy is achieved after the film thickness reaches ~ ¾ λ divided by the index of refraction of the material being deposited, e.g. a GaN (n = 2.3) deposition growth rate accuracy of ± 1% using 660 nm light is achieved after a ~ 210 nm of a single epilayer is deposited.
² Resolution measured by one standard deviation of the measured temperature. Temperature range is configurable based on specific requirements; e.g., 550°C-1300°C for AlN growth. Temperature resolution is ± 0.2 °C for temperatures above 600°C.
³ Curvature specifications are reactor dependent; the above specifications are based on a typical setup with detector to sample distance of ~ 0.3 m. A smaller convex radius of curvature minimum value, -0.17 m, is achieved with an optional large format detector.
⁴ Temperature range is material/structure dependent, e.g., 300 -1200˚C for GaN and SiC templates/substrates. Thickness measurement requires at least 1.2 µm of film (GaN on sapphire), but can then be used to monitor very small (~ 1 nm) incremental changes. For other materials and structures, please contact k-Space for the appropriate -BE specifications.

kSA ICE module breakdown for an ICE-R-ECPR-MOS head with 660 nm reflectivity, 660 nm
curvature, and 960 nm ECPR capability

kSA ICE outer dimensions for an ICE-R-ECPR-MOS head with 660 nm reflectivity, 660 nm
curvature, and 960 nm ECPR capability 

Base system configuration:
kSA ICE systems are configured based on the technology components selected by the end user. For example, an ICEECPR system provides a kSA ICE tool configured only for measurement of 960 nm ECP Temperature and Reflectivity. The table below outlines the hardware configuration for each module (-MOS, -R, -ECPR, and -BE).

* Reactor rotation speed dependent. For one measurement per rotation at 1500 RPM the frequency is 25 Hz.

Controller hardware rack configuration:
The kSA ICE hardware configuration for a typical kSA ICE system requires a single CPU/hardware rack (standard 4U height) and a source rack for LEDS and/or lasers (standard 2U height). Additional 2U and/or 3U hardware racks may be required for additional ICE optical heads such as for synchronous multi-zone control.

Additional upgrade or add-on options:
Optional add-ons and upgrades are also available to accommodate other applications and materials or to further enhance the functionality of the tool, as needed by the end user. If a particular upgrade or customization is required and is not listed below, please contact k-Space for more information.

Please note that most specifications are materials and reactor-dependent.

¹ Film thickness and growth rate accuracy is film thickness dependent. Generally, this accuracy is achieved after the film thickness reaches ~ ¾ λ divided by the index of refraction of the material being deposited, e.g. a GaN (n = 2.3) deposition growth rate accuracy of ± 1% using 405 nm light is achieved after a ~ 132 nm of a single epilayer is deposited.
² Curvature specifications are reactor dependent; the above specifications are based on a typical setup with detector to sample distance of ~ 0.3 m.
³ As an accessory to an ICE-ECPR tool, ICE-SPECT connects to the same fiber as a -ECPR module when used for in-situ -ECPR calibration. It also uses the kSA ICE software and license key provided with the kSA ICE system for operation.

The kSA ICE system mounting configuration varies based on the particular MOCVD reactor for which it is configured. Standard viewport sizes include 1.33” o.d. (mini-conflat) and larger and slit-style viewports (for Veeco k465i and Aixtron G-series reactors). k-Space can manufacture and supply custom mounts and x-y stages when required. It is highly recommended that an angled viewport is utilized to minimize back reflection of the k-Space light sources for all kSA ICE modules; an angled viewport is required for the most reliable curvature measurement (-MOS). A variety of angled viewports options are available; please contact k-Space for more information.
Optical Access:

• Minimum clear aperture diameter of 1.8 mm is required for -ECPR and -R, and 5 mm minimum clear aperture diameter is required for -MOS curvature measurements. Contact k-Space for specific ICE-BE module optical access requirements.

Synchronization of Data during Rotation:

• From user supplied home pulse: 3 – 28 V, positive or negative going pulse; minimum width of 500 µs.

• If no home pulse is supplied by customer/reactor, kSA can supply the synchronization in one of two ways:

  – Synchronize based on platen/wafer reflectivity signal (with -R ICE module). This alleviates the need for a hard trigger source and solves the problem of “slipping” platens not rigidly attached to the rotation shaft/spindle.

  – Synchronize using the optional kSA-TRG, an optical-trigger mounted in proximity to rotation spindle.

The kSA ICE software utilizes the user-friendly Windows-standard operating environment with extensive error checking and file handling. Typical features are following:

• Utilizes signal intensity changes in the wafer and carrier to visually trace and define wafer positions during rotation. The user is able to accurately place measurement “markers” at any position to enable real-time monitoring. Wide markers are available when averaging is desirable.

• Multi-wafer acquisition for full real-time integration and display of all pertinent acquisition parameters, at all marker positions (up to 20 markers).

• Capable of dynamically adjusting the laser and/or detector integration times to maintain the highest S/N upon surface reflectivity changes during film deposition.

• Complementary analysis software for post-deposition/acquisition analysis. Data storage in ASCII, Excel, or binary file formats facilitates alternative data analysis by user.

• Transports graphics directly to Windows clipboard or exports directly to .wmf, .bmp, .png, or .tif formats. Export data to .xls and .txt formats.

• Complete TCP/IP interface for custom, real-time data transfer and program control.

• Ability to write data in real-time to an SQL database.

• Complete analog and digital data I/O capability.

• User configurable window layout.

kSA ICE software screen shot with multiple real-time multi-wafer measurements

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